|
Optical design |
Toroidal Grating Type IV VLS single optic |
|
Focal length |
300 mm |
|
Aperture |
f/6 |
|
Grating |
1200 gr/mm : 50-300 nm |
|
Optic coating |
MgF2 optimized at 121 nm standard or Pt option |
|
Deviation angle |
70° |
|
Dispersion |
2.3 nm/mm at 50 nm |
|
Drive |
Fast worm drive |
|
Resolution |
better than 0.2 nm |
|
Vacuum |
5 10-6 mbar (HV version)
5 10-8 mbar (UHV version)
|
|
Pumping flange |
DN63 CF |
|
Entrance port |
Micrometric slits (10 µm to 2 mm) |
|
Exit port |
Micrometric slits (10 µm to 2 mm) or Adjustable CCD port |
|
Entrance flange |
DN40 KF (DN40 CF) |
|
Exit flange |
DN40 KF for slit version (DN40 CF)
DN100CF for CCD version
|